Scanning Auger Microprobe
Capabilities:
0.2 micron probe size
Dual sputtergun
Fracture stage
Typical Applications:
Chemical composition of corrosion scales or wear scars, etc.
Determination of thickness of coatings, oxide scale or surface films in microelectronics and metal manufacturing
Surface contamination such as in rolled sheets or other finished products
In-situ fracture for analysis of grain boundary segregation
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